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High frequency micromechanical piezo-on-silicon block resonators
This paper reports on the design, implementation and characterization of high-frequency single crystal silicon (SCS) block resonators with piezoelectric electromechanical transducers. The resonatorsExpand
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High-Figure-of-Merit X-Cut Lithium Niobate MEMS Resonators Operating Around 50 MHz for Large Passive Voltage Amplification in Radio Frequency Applications
This article reports on the modeling, design, fabrication, and testing of high-performance X-cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The objective ofExpand
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A 1.75 GHz piezoelectrically-transduced SiC lateral overmoded bulk acoustic-wave resonator
This paper presents the development and study of a novel lateral overmoded bulk acoustic-wave resonator (LOBAR) using piezoelectric AlN on SiC technology. The SiC LOBAR is a new class of resonantExpand
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A −173 dBc/Hz @ 1 MHz offset Colpitts oscillator using AlN contour-mode MEMS resonator
A differential Colpitts oscillator using AlN MEMS CMR designed in 0.13 um CMOS is presented in this work. Expand
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AlN Contour-Mode Resonant Sensors ( CMR-S ) with Self-Sustained CMOS Oscillator
This paper reports on the design and experimental verification of a new class of nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) for the detection of volatile organic chemicals (VOC) operatingExpand
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Magnetically-actuated micromechanical nickel patches for a monolithically integrated reconfigurable antenna on printed circuit board
In this paper, we present magnetically-actuated micromechanical Ni patches that have been monolithically integrated on a printed circuit board to demonstrate a reconfigurable pixelated antennaExpand
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Acousto-Optic Modulator Based on the Integration of Arsenic Trisulfide Photonic Components with Lithium Niobate Surface Acoustic Waves
An acousto-optic modulator formed by an Arsenic Trisulfide (As 2 S 3 ) Mach-Zehnder interferometer placed inside a surface acoustic wave cavity on a Lithium Niobate (LN) wafer is demonstrated for theExpand
Extraction of Elastooptic Coefficient of Thin-Film Arsenic Trisulfide Using a Mach–Zehnder Acoustooptic Modulator on Lithium Niobate
An acousto-Optic Modulator (AOM) formed by an Arsenic Trisulfide (As<inline-formula><tex-math notation="LaTeX">$_2$</tex-math></inline-formula>S<inline-formula><tex-mathExpand
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X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications
This article reports Lithium Niobate (LN) based shear horizontal (SH0) resonators utilizing suspended and solidly mounted structures for radio frequency (RF) applications. The solidly mounted SH0Expand
Voltage Amplification of Radio Frequency Signals With Pitch-Asymmetric Acoustic Delay Lines
We present the conceptual approach, theoretical simulations, and experimental results of a novel device based on acoustic delay lines with different pitch between transmitter and receiver (dubbedExpand