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- Publications
- Influence
High aspect ratio TSV copper filling with different seed layers
- M. J. Wolf, T. Dretschkow, +6 authors H. Reichl
- Materials Science
- 58th Electronic Components and Technology…
- 27 May 2008
The paper addresses the through silicon via (TSV) filling using electrochemical deposition (ECD) of copper. The impact of seed layer nature on filling ratio and void formation will be discussed with… Expand
Assembly and reliability of flip chip solder joints using miniaturized Au/Sn bumps
- M. Hutter, F. Hohnke, H. Oppermann, M. Klein, G. Engelmann
- Materials Science
- Proceedings. 54th Electronic Components and…
- 1 June 2004
Flip chip assembly experiments using small electroplated Au/Sn bumps, i.e. bumps of 50 /spl mu/m in diameter and less, are carried out. After plating the bumps consist of a Au layer with a thinner Sn… Expand
Precise flip chip assembly using electroplated AuSn20 and SnAg3.5 solder
- M. Hutter, H. Oppermann, G. Engelmann, L. Dietrich, H. Reichl
- Materials Science
- 56th Electronic Components and Technology…
- 5 July 2006
In order to reduce costs in packaging especially for optoelectronic devices technologies are desirable that enable precise assembly at low cost. A flip chip assembly approach is presented using the… Expand
Nanoscale decoration of electrode surfaces with an STM
- D. M. Kolb, G. Engelmann, J. Ziegler
- Chemistry
- 1 June 2000
Abstract The tip of a scanning tunnelling microscope (STM) has been used to deposit nanometer-sized clusters of copper or silver on bare and thiol-covered gold electrode surfaces at predetermined… Expand
Effect of the Cu thickness on the stability of a Ni/Cu bilayer UBM of lead free microbumps during liquid and solid state aging
- C. Jurenka, J. Kim, +4 authors H. Reichl
- Materials Science
- Proceedings Electronic Components and Technology…
- 20 June 2005
The present study focuses on liquid and solid phase reactions between an electrodeposited bilayer UBM and Sn, which is chosen as worst case solder material for lead free bumping. Small sized bumps… Expand
Tip-Induced Formation of Nanometer-Sized Metal Clusters*
- J. Ziegler, G. Engelmann, D. M. Kolb
- Chemistry
- 1999
The tip of a scanning tunneling microscope has been used to deposit nanometer-sized copper and palladium clusters on flat gold electrode surfaces at predetermined positions. This allows the… Expand
Development and evaluation of lead free reflow soldering techniques for the flip chip bonding of large GaAs pixel detectors on Si readout chip
- M. Klein, M. Hutter, +7 authors H. Reichl
- Materials Science
- 58th Electronic Components and Technology…
- 27 May 2008
Lead free reflow soldering techniques applying AuSn as well as SnAg electroplated bumps were chosen for the evaluation of the flip chip bonding process for a x-ray pixel detector. Both can be used in… Expand
W-band flip-chip VCO in thin-film environment
- F. J. Schmuckle, F. Lenk, +6 authors W. Heinrich
- Engineering
- IEEE MTT-S International Microwave Symposium…
- 12 June 2005
A flip-chip packaging approach for W-band GaAs chips is presented using thin-film structures on silicon as carrier substrate. Reliability investigations indicate that, depending on bump size, the CTE… Expand
Development and fabrication of a thin film thermo test chip and its integration into a test system for thermal interface characterization
- M. AboRas, G. Engelmann, +7 authors B. Michel
- Materials Science
- 19th International Workshop on Thermal…
- 2 December 2013
This paper deals with the development und fabrication of a thermal test chip (TTC) to be used for thermal characterisation and qualification of materials and packages. The TTC is designed as a… Expand
Copper filling of TSVs for interposer applications
- N. Jurgensen, Q. H. Huynh, +8 authors C. Jager
- Materials Science
- IEEE 14th Electronics Packaging Technology…
- 1 December 2012
For the electrochemical filling of through silicon vias (TSVs) the geometry of these vias as well as their quantity on the wafer have a severe influence on the electrochemical process parameters, in… Expand