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Silicon-MEMS gyroscope is an important part of MEMS (micro electrical mechanical system). There are some disturbances ignored in traditional macro gyroscope that must be evaluated newly because of its smaller size (reaching the level of micron). In these disturbances, the temperature changing largely influences the performance of MEMS gyroscope. The(More)
Silicon-MEMS gyroscope is an important part of MEMS ( Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these disturb, the air pressure largely influences the performance of the MEMS gyroscope. Different air pressure causes(More)
Silicon-MEMS gyroscope is an important part of MEMS ( Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these disturb, the air pressure largely influences the performance of the MEMS gyroscope. Different air pressure causes(More)
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