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— This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection(More)
The Microflown is an acoustic sensor that measures particle velocity instead of pressure, as conventional microphones do. This paper presents an analytical model describing the physical processes that govern the behaviour of the sensor and determine its sensitivity. Forced convection by an acoustic wave causes a small, asymmetrical, perturbation to the(More)
This paper presents the results of 2D-finite-element simulations of the periodic change in capacitance between two periodic structures, one sliding and one fixed (i.e. sense-structure). These structures are potentially interesting for long-range and high-accuracy position detection of microactuators. The use of periodic geometries and the combination of a(More)
This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs(More)
An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral-and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving(More)
We present a study on thick Si-rich nitride/polycrystalline Si/silicon oxide multilayer-stacks made by LPCVD and PECVD techniques. The pattern transfer into the multilayer-stacks is achieved by dry etching techniques such as SF 6-based ICP plasma and the so-called Bosch processes. The steep profiles and high selectivity obtained for the developed processes(More)
Flow-sensor arrays uncover the potential to measure spatio-temporal flow patterns rather than flow measurements at just a single point. We present in this paper the developments in design, fabrication and interfacing of biomimetic flow-sensor arrays, inspired by flow-sensitive organs (cerci) of crickets. For the purpose of high-resolution flow field(More)
A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO 2 releasing. It is demonstrated that the new technique is not only(More)
Next to image sensors, future's robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field(More)
High density arrays of artificial hair sensors, biomimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that,(More)