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— This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection(More)
The aim of this work is to characterize the boundary layer over small appendages in insects in longitudinal and transverse oscillatory flows. The problem of immediate interest is the early warning system in crickets perceiving flying predators using air-flow-sensitive hairs on cerci, two long appendages at their rear. We studied both types of oscillatory(More)
The Microflown is an acoustic sensor that measures particle velocity instead of pressure, as conventional microphones do. This paper presents an analytical model describing the physical processes that govern the behaviour of the sensor and determine its sensitivity. Forced convection by an acoustic wave causes a small, asymmetrical, perturbation to the(More)
A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO 2 releasing. It is demonstrated that the new technique is not only(More)
This paper presents the results of 2D-finite-element simulations of the periodic change in capacitance between two periodic structures, one sliding and one fixed (i.e. sense-structure). These structures are potentially interesting for long-range and high-accuracy position detection of microactuators. The use of periodic geometries and the combination of a(More)
Nonlinear polymers are promising materials for high speed active integrated optics devices. In this paper we evaluate the perspectives polymer based nonlinear optical devices can offer. Special attention is directed to the materials aspects. In our experimental work we applied mainly Akzo Nobel DANS side-chain polymer that exhibits large second and third(More)
This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs(More)
An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral-and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving(More)
It is shown that, by adapting the refractive indexes prerequisite for the use of the FDBPM algorithm. We remark in the vicinity of interfaces, the ZD-beam propagation method based On the finite difference (FDBPM) scheme can be made much more effective. This holds especially for TM modes propagating in structures with high-index contrasts, such as surface(More)
We present a study on thick Si-rich nitride/polycrystalline Si/silicon oxide multilayer-stacks made by LPCVD and PECVD techniques. The pattern transfer into the multilayer-stacks is achieved by dry etching techniques such as SF 6-based ICP plasma and the so-called Bosch processes. The steep profiles and high selectivity obtained for the developed processes(More)