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Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater
- M. Kimura, Fumitoshi Sakurai, Hirao Ohta, T. Terada
- Materials Science, Computer Science
- Microelectron. J.
- 1 February 2007
New structural Pirani gauge-type thermal vacuum sensor with a microheater and two pn junction diodes, Th-A and Th-B, as a high-sensitive temperature sensor working like a thermistor formed on a micro-air-bridge (MAB) is proposed. Expand
Possible Application of MEMS Micro-fabrication Technologies to Microbeam Probing Studies