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Design and performance evaluation of an ultrasonic motor was discussed in [Wen et al., Thin-disc piezoelectric ultrasonic motor. Part I: design and performance evaluation, Ultrasonics]. Higher precision position control of piezoceramic ultrasonic motor depends on mechanical design and servo control of a very precise and adequate metrology. This paper(More)
The thin-disc piezoceramic-driving ultrasonic actuator dedicated to a stepping ultrasonic motor is proposed. The mechanical hysteresis and dead-zone phenomena are automatically compensated by a closed loop servo control, i.e. Fuzzy Sliding-Mode Control (FSMC), for position tracking. The controller design of FSMC has syncretized the fuzzy reasoning and(More)
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