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A Tunable Strain Sensor Using Nanogranular Metals

• Christian H. Schwalb, Christina Grimm, +8 authors Michael Huth
• Sensors
• 2010

This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements… (More)

Simulation-based analysis of the Heat-Affected Zone during target preparation by pulsed- laser ablation through stacked silicon dies in 3D integrated System-in-Packages

• Stefan Martens, Markus Fink, Walter Mack, Friedemann Völklein, Jürgen Wilde
• 2010 11th International Thermal, Mechanical…
• 2010

The trends of 3D integration and System-in-Package (SiP) require the adaptation of target preparation methods for failure analysis of these complex integrated devices. Recent improvements in… (More)

Laser Processing by Using Diffractive Optical Laser Beam Shaping Technique

• Gediminas Račiukaitis, Evaldas Stankevicius, +5 authors Friedemann Völklein
• 2011

Laser beam shaping and homogenization techniques are substantial to optimize a large number of laser-material processing applications and laser-material interaction studies. Diffractive optical… (More)

Phase gratings with tunable diffraction efficiency.

• Moritz Stürmer, Matthias Wapler, Jana Schmitt, Friedemann Völklein, Ulrike Wallrabe
• Optics express
• 2016

We present a new principle for tuning the diffraction efficiency of an optical grating and its implementation in a micro-optical device. The overlap of two phase gratings is used to vary the… (More)

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