Francesc Pérez-Murano

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Shadow masking (also known as nanostencil lithography, SL) is a well known technique to fabricate patterns on a surface. It is a versatile method that can be used in a variety of applications. There has been recently a strong interest regarding the use of shadow masks, mostly related to combinatorial materials science, organic based device fabrication, as(More)
A CMOS compatible direct write laser lithography technique has been developed for cantilever fabrication on prefabricated standard CMOS. We have developed cantilever based sensors for mass measurements in vacuum and air. The cantilever is actuated into lateral vibration by electrostatic excitation and the resonant frequency is detected by capacitive(More)