Francesc Pérez-Murano

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Shadow masking (also known as nanostencil lithography, SL) is a well known technique to fabricate patterns on a surface. It is a versatile method that can be used in a variety of applications. There has been recently a strong interest regarding the use of shadow masks, mostly related to combinatorial materials science, organic based device fabrication, as(More)
A top-down clamped-clamped beam integrated in a CMOS technology with a cross section of 500 nm × 280 nm has been electrostatic actuated and sensed using two different transduction methods: capacitive and piezoresistive. The resonator made from a single polysilicon layer has a fundamental in-plane resonance at 27 MHz. Piezoresistive transduction avoids the(More)