Francesc Pérez-Murano

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We present a time-resolved study of the evaporation in air of minuscule sessile droplets deposited by nanodispensing techniques. Highly sensitive nanomechanical resonators are designed to monitor in time the mass variation of evaporating liquid droplets. The precision of the measurement setup enables the study of droplets with diameters in the 1 mum range,(More)
Local oxidation of silicon surfaces by atomic force microscopy is a very promising lithographic approach at nanometer scale. Here, we study the reproducibility, voltage dependence, and kinetics when the oxidation is performed by dynamic force microscopy modes. It is demonstrated that during the oxidation, tip and sample are separated by a gap of a few(More)
A microspotting tool, consisting of an array of micromachined silicon cantilevers with integrated microfluidic channels is introduced. This spotter, called Bioplume, is able to address on active surfaces and in a time-contact controlled manner picoliter of liquid solutions, leading to arrays of 5 to 20-microm diameter spots. In this paper, this device is(More)
Highly sensitive conversion of motion into readable electrical signals is a crucial and challenging issue for nanomechanical resonators. Efficient transduction is particularly difficult to realize in devices of low dimensionality, such as beam resonators based on carbon nanotubes or silicon nanowires, where mechanical vibrations combine very high(More)
A low-power multi-channel CMOS digital read-out IC (ROIC) for differential piezo-resistive sensing is presented as part of the positioning system of a liquid dispensing MEMS. New very low-voltage and single-battery compatible CMOS circuits are proposed for digital gain tuning, pre-amplification and integrating A/D conversion. Overall low-power consumption(More)
The creation of highly efficient guiding patterns for the directed self-assembly of block copolymers by resistless nanolithography using atomic force microscopy (AFM) is demonstrated. It is shown that chemical patterns consisting of arrays of lines defined on a brush layer by AFM allow the alignment of the blocks of lamella-forming polymers. The main(More)
Francesc Pérez-Murano, Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc van den Boogaart and Juergen Brugger 1 Instituto de Microelectronica de Barcelona CNM-IMB (CSIC), Campus UAB, 08193 Bellaterra (Barcelona), Spain. 2 Dept.Electronics Engineering, Universitat Autonoma de Barcelona, ETSE-UAB, 08193-Bellaterra(More)
We report on the synthesis, characterization and application of a novel nanocomposite made of a negative tone epoxy based photoresist modified with organic-capped Fe(2)O(3) nanocrystals (NCs). The mechanical properties of the nanocomposite drastically improve upon incorporation of a suitable concentration of NCs in the polymer, without deteriorating its(More)