Fengtian Zhang

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The force-balanced micro accelerometer is selected to study the calibration in MEMS sensors. The fabrication and test of accelerometer are presented, the test data is calibrated by least squared method and genetic algorithm in cubic function, and the results are compared to study characteristics of calibration on different methods. The advantage of least(More)
Dimension uncertainty inevitably occurs in almost every fabrication of micro structure because of its small size and ununiformity of material, therefore, the dimension error is a significant factor to be considered in MEMS structure design. The unsymmetrical gaps of capacitors induced by processing are selected to analyze the effects of error on the pull-in(More)
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