Feng-Chih Chang

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We demonstrate a new flexible metal–insulator–metal capacitor using 9.5-nm-thick ZrO 2 film on a plastic polyimide substrate based on a simple and low-cost sol–gel precursor spin-coating process. The surface morphology of the ZrO 2 film was investigated using scan electron microscope and atomic force microscope. The as-deposited ZrO 2 film under suitable(More)
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