Fabien Parrain

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A major task for the implementation of Built-In-Self-Test (BIST) strategies for MEMS is the generation of the test stimuli. These devices can work in different energy domains and are thus designed to sense signals which are generally not electrical. In this work, we describe, for different types of MEMS, how the required non-electrical test stimuli can be(More)
A major problem for applying self-test techniques to MEMS is the multi-domain nature of the sensing parts that require special test equipment for stimuli generation. In this work we describe, for three different types of MEMS that work in different energy domains, how the required non-electrical test stimuli can be induced onchip by means of electrical(More)
<i>This paper illustrates an approach to design and validation of heterogeneous systems. The emphasis is placed on devices which incorporate MEMS parts in either a single mixed-technology (CMOS</i> + <i>micromachining) SOC device, or alternatively as a hybrid system with the MEMS part in a separate chip. The design flow is general, and it is illustrated for(More)
This paper describes the development of a model of vibrating piezoelectric micro-gyro sensor using analog hardware description. Our procedure implies several steps with emphasis in model complexity reduction and identification of critical parameters. The proposed macro-model permits multi-physic simulations including mechanical, piezo-electric and(More)
The preamplifier is a critical component of gyrometer’s electronics. Indeed the resolution of the sensor is limited by its signal to noise ratio, and the gyrometer’s thermal stability is limited by its gain drift. In this paper, five different kinds of preamplifiers are presented and compared. Finally, the design of an integrated preamplifier is shown in(More)
We present in this paper a novel tactile fingerprint sensor composed by a single row of microbeams realized by the way of front side bulk micromachining from a standard CMOS circuit. When the user passes his finger on the sensor, the ridges and the valleys that compose the fingerprint induce deflections in the different microbeams. Using a piezoresistive(More)
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink® simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented(More)
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for(More)
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for(More)