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Owing to the high power density, long life time and environmentally friendly characteristics, micro-supercapacitors have attracted much attention for powering microelectromechanical systems (MEMS) devices. This paper describes the fabrication and performance of a planar micro-supercapacitor. The fabrication process is large scale and IC compatible, and thus(More)
Microfabricated thermionic emitters form a crucial part of thermionic energy converters, which could find applications in future concentrated solar thermal power plants. Here we report a new stress-relieved design for p-doped and n-doped silicon carbide (SiC) emitters, measurements of their thermionic emission and work functions at temperatures of up to(More)
The combination of high electric fields and moisture from the environment can lead to electrochemical reactions causing corrosion, which can severely impact microelectromechanical systems (MEMS) device reliability and lifetime. In this paper, we present a detailed study of the corrosion behavior and surface passivation methods for enhancing the corrosion(More)
The ° -moments of the charge distributions of projectile fragments in sulphur fragmentation at 200A GeV are obtained by using the Monte Carlo partition method based on a two-source emission picture. Whence, the correlation between the ° -moments can be obtained. The distributions of the °-moments are investigated. We have also calculated the correlations(More)
Growing interest in assessing the reliability of microelectromechanical systems has created a need for the development of microinstruments to interrogate MEMS behavior under diverse conditions. This paper describes the design and testing of a microinstrument for in-situ reliability studies of contacting surfaces in MEMS. Time-dependent changes in the(More)
The development of electrical contacts to silicon carbide with low specific resistivity and stability is a critical requirement for harsh environment MEMS applications. In this paper, we present a novel method to lower the ohmic contact resistivity and enhance the stability of Pt contacts to polycrystalline 3C-SiC (poly-SiC) operated at elevated(More)
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