The present paper investigates in depth the electrical behaviour of floating electrode MEMS switches when their actuation is performed through the transmission line. The study is carried out through modeling and experimentally obtained capacitance- and current-voltage characteristic. It is demonstrated for the first time that constant down state capacitance… (More)
The paper illustrates the activity carried out under an ESA contract for the development of a miniaturized RF-MEMS SPDT switch and switch matrix using micromachining technology on a silicon substrate for power applications. A manufacturing procedure, based on an eight masks process, has been set up. At present, a broadband single-pole-double-throw (SPDT)… (More)
A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capaci-tive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion… (More)
This work presents a new shunt-type ohmic contact RF-MEMS switch specifically designed as a switchable CPW air bridge. The switch can be used in coplanar waveguide (CPW) reconfigurable multimodal circuits, for a selective use of the CPW odd-mode. The bridge is anchored using folded-beam suspensions, in such a way that two points at each end of the bridge… (More)
A novel circuital model for a shunt connected RF MEMS coplanar switch, based on a fully analytical approach, is presented. The numerical simulations performed with the proposed new model are in good agreement with experimental measurements.
Mexico City an all subjects gave their informed consent to obtain samples. Tear and Serum Samples were collected to determine cytokines IL2, IL-4, IL-5, IFN-g, TNF-a, IL-10 by cytometric bead arrays (CBA), following manufacturer's instructions. Results: Patients showed lower significant levels of L-4 after 6 months of treatment, without changes in IL2, IL5,… (More)
This work presents the design, manufacturing and packaging of a novel K-band 5-bit MEMS phase shifter for applications in Satellite COTM (Communication On The Move) Terminals. The first 4 bits are realized by using a switched line topology whereas the less significant bit consists of a loaded line section. The device has been manufactured in microstrip… (More)
Tetra-methyl ammonium-hydroxide-with-water solution, or TMAHW, is an anisotropic silicon etchant that is gaining considerable use in silicon micromachining as an alternative to the more commonly used KOH (potassium hydroxide) and EDP/EPW (ethylenediamine-pyrocatechol-water) etchants. This is mainly due to its excellent compatibility with CMOS processing,… (More)