F. Blard

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We present a general method for dynamic correction of biases induced by temperature variations. This method is simple to implement and useful when very high precision is required: it indeed allows significant improvements compared to standard static corrections. It is mainly based on a universal dynamic model allowing to describe macroscopic effects of(More)
− In the framework of developing MEMS devices to fabricate AC voltage references for electrical metrology and high precision instrumentation, several first devices have been designed and fabricated using a Silicon On Insulator (SOI) Surface Micromachining process. The measured MEMS AC voltage reference values have been found to be from 5 V to 100 V in a(More)
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