Ewoud Frank van West

  • Citations Per Year
Learn More
Levitation techniques allow delicate objects, such as silicon wafers, to be manipulated without contact. In case of electrostatic and magnetic levitation, the object can be levitated by actively controlling the electric/magnetic field based on the measured air gap between the object and the levitator. Multiple degrees of freedom are controlled by several(More)
This paper focuses on a practical application of handling contact sensitive objects such as silicon wafers or hard disk media without any contact using electrostatic levitation. Stable electrostatic levitation can be realized by controlling an electrostatic force on the basis of measured suspension air gaps. Two control approaches, namely centralized and(More)
This paper focuses on a practical application of handling contact sensitive objects, such as silicon wafers or hard disk media by a human operator, without any mechanical contact using electrostatic levitation. Stable electrostatic levitation can be realized by controlling the electrostatic attractive force based on measured air gaps. A haptic device is(More)
In electrostatic levitation systems, thin flat objects, such as silicon wafers, can be levitated by controlling the electric field between object and an electrode pattern, depending on the measured gap between them. This allows to manipulate these objects without making physical contact. As the gap between object and electrodes is actively controlled, the(More)
Levitation systems allow delicate objects to be handled without contact by actively controlling a levitation force that suspends the object. A drawback of levitation systems for thin objects is that the lateral force can not be controlled actively and is much weaker than the levitation force. This is a problem for non-contact manipulation systems as the(More)
  • 1