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This paper presents work aimed at optimizing the fabrication of silicon nitride Si(x)N(y) thin-film visible-light planar waveguides using plasma-enhanced chemical vapour deposition (PECVD). The effects of plasma frequency, precursor gas ratio, and thermal annealing in relation to waveguide optical properties (refractive index, propagation losses) are(More)
This article presents a device incorporating surface plasmon resonance (SPR) sensing and surface acoustic wave (SAW) actuation integrated onto a common LiNbO(3) piezoelectric substrate. The device uses Rayleigh-type SAW to provide active microfluidic mixing in the fluid above the SPR sensor. Validation experiments show that SAW-induced microfluidic mixing(More)
We propose two novel electro-optic (EO) deflectors based on two new nonrectangular geometries: the parabolic and the half-horn configurations. These devices not only provide excellent deflection angles, but also have the potential to build nonblocking 2 x 2 optical switches. A deflector figure of merit is defined, and comparisons with existing EO deflectors(More)
A novel reprogrammable optical phase array (ROPA) device is presented as a reconfigurable electro-optic element. One specific application of the ROPA, a 1 x 6 electro-optic space switch, is fully described. Switching angles are within 2 degrees , and switching is achieved through a complementary metal-oxide semiconductor (CMOS) controlled, diffraction(More)
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