This work demonstrates a novel method for deposition of metal oxide thin films, including Al2O3, ZrO2, MnOx, and RuOx where the metal-organic precursors and oxidizing agents are delivered in liquid… (More)
My PhD thesis project involves growing Deep Ultra Violet Light Emitting Diodes (D-UV LEDS) via Metalorganic Chemical Vapor Deposition (MOCVD) with a high Al content Aluminum Gallium Nitride (AlGaN)… (More)