Eric Lifshin

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Scanning electron microscopy (SEM) resolution is limited by many factors that include sample specific properties, microscope stability, noise, the three dimensional nature of the sample and the excitation volume, and the spatial distribution of electrons in the probe known as the point spread function (PSF). If all, but the latter are optimized, the loss of(More)
ACKNOWLEDGEMENTS We sincerely thank our research advisor Dr. Eric Lifshin for his guidance on this project. We also acknowledge our other group members: and Ben Trudell. We express our gratitude to all the developers who contributed to the creation of the two modeling programs used in this work, CASINO and SIMION. ABSTRACT The efficiency of secondary(More)
These experiments were performed using a Carl Zeiss 1540 crossbeam instrument that permits SEM imaging during ion milling. The FIB beam consists of 30 KV Ga ions with currents ranging from several nanoamperes down to several picoamperes. The Schottky source electron gun was run in the high current mode at 1 and 5 KV to provide an electron beam current of(More)
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