Enrico Mastropaolo

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This paper proposes a solution for signal read-out in the MEMS cochlea sensors that have very small sensing capacitance and do not have differential sensing structures. The key challenge in such sensors is the significant signal degradation caused by the parasitic capacitance at the MEMS-CMOS interface. Therefore, a novel capacitive read-out circuit with(More)
A two-port silicon carbide single-clamped beam (cantilever) microelectromechanical system (MEMS) resonant device actuated piezoelectrically and sensed piezoelectrically has been designed, fabricated and tested. Lead zirconium titanate (PZT) has been used as active material to implement the piezoelectric actuator and sensor. Piezoelectric electrodes have(More)
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