En-Chiang Chang

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In this work, we successfully demonstrated a real-time mass sensor utilizing a MEMS-based self-sustained thermal-piezoresistive oscillator (TPO) fabricated by a standard silicon-on-insulator (SOI) MEMS process. From the measured data recorded by the frequency counter, not only a real-time frequency change with respect to the added mass can be detected but(More)
The non-uniform intensity profile of Gaussian-like laser beams used in interference lithography (IL) leads to a non-uniform dose and feature size distribution across the sample. Previously described methods to improve dose uniformity are reviewed. However, here we examine the behavior of the non-uniformity from the viewpoint of photoresist response rather(More)
This study reports a simple and cost-effective post-lithography solution for reducing the characteristic dimensions of structures on the nanometer scale using an external mechanical force without any modification of the existing exposure system. In particular, this study presents a tunable aluminum wire grid polarizer (WGP) made by a laser interference(More)
The formation of hierarchical architectures is of fundamental importance and yet a relatively elusive problem concerning many natural and industrial processes. In this paper, a nanopost array platform, or a nanopost substrate, has been developed to address this issue through a model study of the drying structures of phosphate buffered saline (PBS) solution.(More)
We present the use of single mode optical fiber (SMF) as an effective and superior spatial filter as a source for an expanded ultraviolet beam used in interference lithography (IL). IL is used to produce nanopatterned structures with a period of 220nm in photoresist on samples over areas of many square centimeters. The SMF further acts as a flexible laser(More)
This study presents an efficient method for fabricating a silver soft mold with a three-dimensional (3-D) nanostructure on flexible polyethersulfone (PES) plastic substrates for a roll-to-roll (R2R) nanoimprint process by employing hot embossing in conjunction with inkjet printing. Prior to fabricating the silver soft mold, the researchers in this study(More)
We demonstrated an approach to generate microscale branch-like salt crystallization patterns induced by a regular nanopillar array fabricated by using the laser interference lithography system. Branches of the inorganic salt crystals had similar shapes repeating at different sizes, ranging from ~ 1 m to 20 m in width, covering the 2×2 cm 2 area patterned(More)
In this paper, a simple but stable laboratory scale laser interference lithography(LIL) system by using a single mode optical fiber (SMF) as a spatial filter, flexible beam transport path, and beam expander has been demonstrated. The linearly polarized light from a HeCd laser (λ=325nm) was coupled into one end of a UV SMF and used the expanding beam(More)
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