Emrah Cimren

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Semiconductor manufacturing is a capital-extensive industry. How to utilize billions of dollars of equipment as efficiently as possible is a critical factor for a semiconductor manufacturer to succeed in stiff competition. Improving performance of manufacturing process increases overall tool throughput, reduces operating costs, and saves companies millions(More)
Cluster tools are highly integrated machines that can perform multiple manufacturing processes. A series of processing steps, transportation, and control are integrated into a single tool. We develop a novel simulation methodology to determine production schedules for cluster tools. The proposed approach provides route of products in the tool with given(More)
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