Emmanuelle Merced

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—Vanadium dioxide (VO 2) undergoes a thermally induced solid-to-solid phase transition, which can be exploited for actuation purposes. VO 2-coated silicon cantilevers demonstrate abrupt curvature changes when their temperature is varied across the phase transition. Unlike the monotonic hysteresis phenomena observed in many other smart materials, the(More)
Vanadium dioxide (VO) 2 , a promising multifunctional smart material, has shown strong promise in microactuation, memory, and optical applications. During thermally induced insulator-to-metal phase transition of VO 2 , the changes of its electrical, mechanical, and optical properties demonstrate pronounced, complex hysteresis with respect to the(More)
The strain, stress and strain energy density of a vanadium dioxide (VO 2)-based microactuator were obtained from experimental curvature measurements as a function of temperature. The study revealed fully reversible strain and stress changes of up to −0.32% and −510 MPa, respectively, and a maximum strain energy density of approximately 8.1 × 10 5 J/m 3(More)
Prandtl–Ishlinskii (PI) hysteresis models have been used widely in magnetic and smart material-based systems. A generalized PI model, consisting of a weighted superposition of generalized play operators, is capable of characterizing saturated and asymmetric hysteresis. The fidelity of the model hinges on accurate representation of the envelope functions,(More)
—This paper presents the first studies on robust closed-loop deflection control of vanadium dioxide (VO 2)-based microac-tuators using self-sensing. The deflection output of the microactu-ator is estimated by VO 2 resistance-based self-sensing through a high-order polynomial in order to eliminate the need for complicated external sensing mechanisms. An H ∞(More)
— A self-sensing approach is used to accurately control the large displacements observed in VO 2-based microelectro-mechanical systems actuators. The device is operated electrother-mally using integrated resistive heaters. The coupling of the abrupt electrical and mechanical changes in VO 2 films across its phase transition allow for the estimation of the(More)
— The large displacements produced by vana-dium dioxide (VO 2) integrated microelectromechanical systems (MEMS)-based actuators have been precisely controlled through the use of a simple proportional-integral-derivative (PID) controller and an integrated heater. A complete device characterization is performed, including quasi-static response, frequency(More)
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