Emmanuelle Merced

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Vanadium dioxide (VO) 2 , a promising multifunctional smart material, has shown strong promise in microactuation, memory, and optical applications. During thermally induced insulator-to-metal phase transition of VO 2 , the changes of its electrical, mechanical, and optical properties demonstrate pronounced, complex hysteresis with respect to the(More)
Prandtl–Ishlinskii (PI) hysteresis models have been used widely in magnetic and smart material-based systems. A generalized PI model, consisting of a weighted superposition of generalized play operators, is capable of characterizing saturated and asymmetric hysteresis. The fidelity of the model hinges on accurate representation of the envelope functions,(More)
— A self-sensing approach is used to accurately control the large displacements observed in VO 2-based microelectro-mechanical systems actuators. The device is operated electrother-mally using integrated resistive heaters. The coupling of the abrupt electrical and mechanical changes in VO 2 films across its phase transition allow for the estimation of the(More)
— The large displacements produced by vana-dium dioxide (VO 2) integrated microelectromechanical systems (MEMS)-based actuators have been precisely controlled through the use of a simple proportional-integral-derivative (PID) controller and an integrated heater. A complete device characterization is performed, including quasi-static response, frequency(More)
—This paper presents the first studies on robust closed-loop deflection control of vanadium dioxide (VO 2)-based microac-tuators using self-sensing. The deflection output of the microactu-ator is estimated by VO 2 resistance-based self-sensing through a high-order polynomial in order to eliminate the need for complicated external sensing mechanisms. An H ∞(More)
A novel self-sensing and robust control technique is presented for a vanadium dioxide (VO<sub>2</sub>)-coated silicon (Si) microactuator. The deflection output of the microactuator is estimated by resistance-based self-sensing through a high-order polynomial model in order to eliminate the need for complicated sensing mechanisms. To accommodate the(More)
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