Emmanuelle Merced

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A self-sensing approach is used to accurately control the large displacements observed in VO2-based microelectromechanical systems actuators. The device is operated electrothermally using integrated resistive heaters. The coupling of the abrupt electrical and mechanical changes in VO2 films across its phase transition allow for the estimation of the(More)
Vanadium dioxide (VO ) 2 , a promising multifunctional smart material, has shown strong promise in microactuation, memory, and optical applications. During thermally induced insulator-tometal phase transition of VO2, the changes of its electrical, mechanical, and optical properties demonstrate pronounced, complex hysteresis with respect to the temperature,(More)
The dynamic response of VO2-coated silicon microcantilevers thermally driven over the film’s insulator-to-metal transition was studied using laser light pulses directly incident on the cantilevers. The measured photothermal response revealed very high curvature changes of approximately 2500 m 1 up to pulse frequencies greater than 100 Hz and readily(More)
Prandtl–Ishlinskii (PI) hysteresis models have been used widely in magnetic and smart material-based systems. A generalized PI model, consisting of a weighted superposition of generalized play operators, is capable of characterizing saturated and asymmetric hysteresis. The fidelity of the model hinges on accurate representation of the envelope functions,(More)
0167-9317/$ see front matter 2011 Elsevier B.V. A doi:10.1016/j.mee.2011.08.004 ⇑ Corresponding author. Tel.: +1 517 432 2130. E-mail address: nelsons@egr.msu.edu (N. Sepúlved This paper reports a multiple-state micro-mechanical memory. The tip displacements of a 350 lm long VO2-coated micro-mechanical silicon cantilever were programmed to absolute(More)
This paper presents the first studies on robust closedloop deflection control of vanadium dioxide (VO2 )-based microactuators using self-sensing. The deflection output of the microactuator is estimated by VO2 resistance-based self-sensing through a high-order polynomial in order to eliminate the need for complicated external sensing mechanisms. An H∞ robust(More)
A novel self-sensing and robust control technique is presented for a vanadium dioxide (VO<sub>2</sub>)-coated silicon (Si) microactuator. The deflection output of the microactuator is estimated by resistance-based self-sensing through a high-order polynomial model in order to eliminate the need for complicated sensing mechanisms. To accommodate the(More)
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