Eloi Marigó

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We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line(More)
In this study, the problem of estimating surface acoustic wave (SAW) velocity and coupling coefficient for multi-layered piezo-substrates is investigated in Aluminum Nitride/Silicon Dioxide/Silicon (AlN/SiO<inf>2</inf>/Si) using energy dissipation method. Assuming SAW energy lying within 10 times of wavelength (&#x03BB;<inf>0</inf>) from the surface with(More)
A top-down clamped-clamped beam integrated in a CMOS technology with a cross section of 500 nm × 280 nm has been electrostatic actuated and sensed using two different transduction methods: capacitive and piezoresistive. The resonator made from a single polysilicon layer has a fundamental in-plane resonance at 27 MHz. Piezoresistive transduction avoids the(More)
The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5% frequency bandwidth in a tunable 26 MHz bandpass filter with a very low bandpass distortion (less than 0.1 dB), which makes the filter suitable for wireless(More)
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