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—The deposition of a thin tin oxide film allows for the manufacture of modern gas sensors. Spray pyrolysis deposition is used to grow the required thin films, as it can be seamlessly integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed and implemented within the Level Set framework. Two models for the(More)
In this work, we present calculated numerical values for the kinetic parameters governing adsorption/desorption processes of carbon monoxide at tin dioxide single-nanowire gas sensors. The response of such sensors to pulses of 50 ppm carbon monoxide in nitrogen is investigated at different temperatures to extract the desired information. A rate-equation(More)
The deposition of a thin tin oxide film allows for the manufacture of modern gas sensors to replace the bulky sensors of previous generations. Spray pyrolysis deposition is used to grow the required sensing thin films, as it can be seamlessly integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed and(More)
In order for the gas sensor devices to enjoy the miniaturization trend that has consumed much of the electronic device industry, major research in the field is undertaken. The bulky sensor devices of previous generations can not easily be incorporated into a CMOS processing sequence, because of their bulky nature and potential higher cost of production.(More)
The ability to deposit a thin tin oxide film on CMOS chip dies has enabled the manufacture of modern smart gas sensor devices. Spray pyrolysis deposition is used to grow the required thin films, as it is an affordable deposition technique which can be integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed(More)
Metal oxide materials such as tin oxide (SnO2) show powerful gas sensing capabilities. Recently, the deposition of a thin tin oxide film at the backend of a CMOS processing sequence has enabled the manufacture of modern gas sensors. Among several potential deposition methods for SnO2, spray pyrolysis deposition has proven itself to be relatively easy to use(More)
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