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Low power systems for wireless microsensors

• K. Bult, Amit Burstein, +18 authors J. Yao
• ISLPED
• 1996

Low power wireless sensor networks provide a new monitoring and control capability for civil and military applications in transportation, manufacturing, biomedical, environmental management, and… (More)

Low Power Wireless Communication and Signal Processing Circuits for Distributed Microsensors

• Gladney C. Asada, Ariel Burstein, +10 authors Fredric Newberg
• 1999

Low power wireless sensor networks provide a new monitoring and control capability for civil and military applications in transportation, manufacturing, biomedical technology, environmental… (More)

Cmos 3-axis Accelerometers with Integrated Amplifier

• E. Kruglick
• 1998

Design, fabrication, and testing of multi-axis CMOS piezoresistive accelerometers is described. Vertical axis accelerometers have been fabricated in multiple processes using a production tested… (More)

Gas-phase silicon micromachining with xenon dffluoride

• Floy I. Chang, Richard Yeh, +4 authors Michael H Hecht
• 2004

Xenon difluoride (XeF2) is a gas phase, room temperature, isotropic silicon etchant with extremely high selectivity to many materials commonly used in microelectromechanical systems (MEMS), including… (More)

Microelectromechanical Components for Articulated Microrobots

• Richard Yeh, E. Kruglick, Kristofer S. J. Pister
• 1999

We propose to create a class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram. We have… (More)

Compilation Part Notice a Distributed, Wireless Mems Technology for Condition Based Maintenance*

• K. Bult, Ariel Burstein, +18 authors J. Yao

The component part is provided here to allow users access to individually authored sections of proceedings, annals, symposia, etc. However, the component should be considered within the context of… (More)

Design and Analysis of a MEMS Based 1:N Monitored Protection Switch

• Rui Chen, Tim S Yeh, +4 authors E. Kruglick
• 2002 28TH European Conference on Optical…
• 2002

The integrated MEMS 1:N protection switch, scalable to M:N protection is proposed that allows monitoring of the redundant network element during normal operation and of the failed network element… (More)

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