Dustin W. Carr

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—This paper discusses a two-piece approach for fabricating two-dimensional (2-D) arrays of tilting MEMS mirrors with application in very-large optical cross-connect switches. In the new process, a two-sided etching of silicon-on-insulator (SOI) wafers is used to create crystalline mirrors on a first wafer that is later aligned and bonded to a separate wafer(More)
We present measurements of transmission of infrared radiation through double-layer metallic grating structures. Each metal layer contains an array of subwavelength slits and supports transmission resonance in the absence of the other layer. The two metal layers are fabricated in close proximity to allow coupling of the evanescent field on individual layers.(More)
In this paper, we tailor the evanescent field coupling between two metal layers with subwavelength slit arrays and created a half-wave plate that imparts a half-wave phase delay to one component of linear polarization. The polarization of linearly polarized light at 1.55 μm wavelength can be rotated by up to 90 degrees, with polarization extinction(More)
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