Learn More
We report a new type of MEMS degenerate mode lumped mass gyroscope architecture. The Dual Foucault Pendulum (DFP) gyroscope consists of two dynamically equivalent, mechanically coupled proof masses, oscillating in anti-phase motion. This dual axis tuning fork behavior creates a dynamically balanced resonator with x-y symmetry in frequency and damping. Phase(More)
We demonstrate, for the first time, sub-1 Hz frequency symmetry in micro-glassblown wineglass resonators with integrated electrode structures. A new fabrication process based on deep glass dry etching was developed to fabricate micro-wineglasses with self-aligned stem structures and integrated electrodes. The wineglass modes were identified by electrostatic(More)
The members of the Committee appointed to examine the dissertation/thesis of DORUK SENKAL find it satisfactory and recommend that it be accepted. iii ACKNOWLEDGMENT I am deeply indepted to Dr. Hakan Gurocak, my thesis advisor, for his valuable support through my Master's studies. Not only he helped me through every step of the research with his supervision(More)
  • 1