Doruk Senkal

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We report a new type of MEMS degenerate mode lumped mass gyroscope architecture. The Dual Foucault Pendulum (DFP) gyroscope consists of two dynamically equivalent, mechanically coupled proof masses, oscillating in anti-phase motion. This dual axis tuning fork behavior creates a dynamically balanced resonator with x-y symmetry in frequency and damping. Phase(More)
We demonstrate, for the first time, sub-1 Hz frequency symmetry in micro-glassblown wineglass resonators with integrated electrode structures. A new fabrication process based on deep glass dry etching was developed to fabricate micro-wineglasses with selfaligned stem structures and integrated electrodes. The wineglass modes were identified by electrostatic(More)
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