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- Max Light, Isaac D. Sudit, Francis. F. Chen, Donald Arnush
- 1999

Travelingand standing-wave characteristics of the wave fields have been measured in a helicon discharge using a five-turn, balanced magnetic probe movable along the discharge axis z. Helical andâ€¦ (More)

- Donald Arnush
- 2000

It is well known that the simple theory of helicon waves, in which the electron mass me is neglected, is valid only if Ez also vanishes, a condition which is not satisfied in experiment. Exactâ€¦ (More)

The theory of helicon waves is extended to include finite electron mass. This introduces an additional branch to the dispersion relation that is essentially an electron cyclotron or Trivelpieceâ€“â€¦ (More)

A simple method for analyzing Langmuir probe curves is described which yields the ion density in weakly collisional plasmas for which purely collisionless theories give erroneous results. The methodâ€¦ (More)

- D. D. Blackwell, T G Madziwa, Donald Arnush, F. F. Chen
- Physical review letters
- 2002

The high ionization efficiency of helicon discharges has been attributed to Landau damping and mode coupling to Trivelpiece-Gould (TG) modes. Though theory predicts the importance of TG modes, theyâ€¦ (More)

Plasma densities produced by halfand full-wavelength (HW and FW) helical antennae in helicon discharges are compared. It is found that HW antennae are more efficient than FW ones in producing plasmaâ€¦ (More)

Operation of helicon discharges at magnetic fields B0 below 100 G is of interest for plasma etching and deposition reactors if high ion flux can be maintained with reduced field requirements. Theâ€¦ (More)

Helicon wave (whistler waves bounded transversely by a magnetic field surface) propagation is investigated for a cylindrically symmetric curved (flaring) boundary using a finite-element method whereâ€¦ (More)

- T.G. Madziwa-Nussinov, Donald Arnush, F. F. Chen
- IEEE Transactions on Plasma Science
- 2007

Self-consistent computations of electric fields (E-fields) and ion orbits inside trenches were done in order to verify Hashimoto's hypothesis of damage that is induced during plasma processing. Inâ€¦ (More)

Helicon discharges, noted for their exceptional ionization efficiency and high densities, are now used in plasma processing. The weak magnetic fields used in plasma etch reactors lead toâ€¦ (More)