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Automated material handling systems (AMHS) play a central role in modern wafer fabrication facilities (fabs). Typically, AMHS used in wafer fabs are based on discrete vehicle-based overhead systems such as overhead hoisted vehicles. Conveyor-based continuous flow transport (CFT) implementations are starting to gain support with the expectations that CFT(More)
This research explores analytical models useful in the design of vehicle-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is to correctly estimate the throughput and move request delay. This analysis proposes a computationally effective analytical approach to multi-vehicle AMHS performance modeling for a(More)
Finding the optimal layout of Automated Material Handling Systems (AMHS) is critical for the design of next generation semiconductor wafer fabs. This paper proposes a greedy heuristic to determine the configuration of a conveyor-based AMHS featuring turntables and crossovers. Using a conveyor-based analytical model, the heuristic identifies the crossover(More)
This research presents several heuristics to optimize the location of crossovers in a conveyor-based Automated Material Handling System (AMHS) for a semiconductor wafer fabrication facility. The objective is to determine the location of crossovers that minimizes the total cost of the expected work-in-process on the conveyor and the cost of installing and(More)
The purpose of this research was to identify the factors in a wafer fabrication facility that significantly affect the cycle times of two main technologies that are currently in process and in demand for the next few years. Moreover, the goal was to construct the characteristics curves that would provide information about the different capabilities of a(More)
Genetic algorithms (GAs) are one of the many optimisation methodologies that have been used in conjunction with simulation modelling. The most critical step with a GA is the assignment of the selective probabilities to the alternatives. Selective probabilities are assigned based on the alternatives' estimated performances which are obtained using(More)
This paper proposes an analytical model useful in the design of conveyor-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is to correctly estimate the work-in-process on the conveyor and assess the system stability. The analysis approach is based on a queuing model, but takes into account details of the(More)
We present an analytical approach for estimating the expected time for an automated material handling system (AMHS) to respond to move requests at loading stations in a vehicle-based, unidirectional, closed-loop AMHS. The expected response times are important for estimating the expected work-in-process (WIP) levels at the loading stations for design(More)