Diego Ruben Barrettino

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—This paper presents two mixed-signal monolithic gas sensor microsystems fabricated in standard 0.8-m CMOS technology combined with post-CMOS micromachining to form the microhotplates. The on-chip microhotplates provide very high temperatures (between 200 C and 400 C), which are necessary for the normal operation of metal–oxide sensing layers. The first(More)
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