De-miao Wang

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Thin film bulk acoustic resonators (FBAR) can be integrated in RFIC as an excellent RF and MF filter. Aimed at high frequency precision FBAR, a new method of evaporating the electrode layer of FBAR by laser is provided to trim FBAR resonant frequency. The experiment results confirm the feasibility of this method and show with a trimming precision up to(More)
Al-doped ZnO (AZO) thin film is a promising alternative to an ITO electrode in organic light-emitting diodes applications due to its low price, non-toxicity and other promising properties. In this paper, AZO thin films of different thicknesses were deposited on glass substrates as transparent conducting films by sputtering. The effect of film thickness on(More)
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