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We study the influence of von Karman nonlinearity, van der Waals force, and a athermal stresses on pull-in instability and small vibrations of electrostatically actuated mi-croplates. We use the Galerkin method to develop a tractable reduced-order model for elec-trostatically actuated clamped rectangular microplates in the presence of van der Waals(More)
We analyze electrostatic deformations of rectangular, annular circular, solid circular, and elliptic micro-electromechanical systems (MEMS) by modeling them as elastic membranes. The nonlinear Poisson equation governing their deformations is solved numerically by the meshless local Petrov–Galerkin (MLPG) method. A local symmetric augmented weak formulation(More)
We consider the problem of estimating the state of a system when measurement noise is a function of the system's state. We propose generalizations of the iterated extended Kalman filter and of the extended Kalman filter that can be utilized when the state estimate distribution is approximately Gaussian. The state estimate is computed by an iterative(More)
Values of constants c 2 and c 3 in Table 1 should be interchanged (i.e., c 2 = 0.126 and c 3 = 0.325. Authors apologize for any inconvenience caused to users of the Table. Abstract: A novel estimate for the line-to-ground capacitance that accurately predicts the pull-in instability parameters for narrow electrostatically actuated microbeams is proposed.(More)
We consider the von Kármán nonlinearity and the Casimir force to develop reduced-order models for prestressed clamped rectangular and circular electrostatically actuated microplates. Reduced-order models are derived by taking flex-ural vibration mode shapes as basis functions for the transverse displacement. The in-plane displacement vector is decomposed as(More)