David G. Hansen
Highly Influential Citations3
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Significant energy savings can be achieved in commercial building operation, along with increased comfort and control for occupants, through the implementation of advanced technologies. This document… Continue Reading
On June 11, 2003, representatives from universities, federal and state government agencies, Department of Energy national laboratories, and the private sector attended a one-day workshop in… Continue Reading
Introduction Cleaning is required following CMP (chemical mechanical planarization) to remove particles as well as metallic and organic contamination. Particle and contamination requirements tighten… Continue Reading