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A low-power silicon-tunnel-diode-based LC-tuned oscillator transmitter is proposed for high-temperature MEMS sensing and wireless data transmission applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a miniature on-board coil loop serving as the(More)
A RF voltage-controlled oscillator (VCO) employs an on-chip, high-Q, three-dimensional (3-D) coil inductor and micro-machined variable capacitor for frequency tuning. Unlike conventional spiral inductors, the 3-D inductor minimizes the substrate loss and achieves a record Q of 30 at 1 GHz. The micromachined variable capacitor achieves a 15% tuning range(More)
We are developing a personal micronavigation system that uses high-resolution gait-corrected inertial measurement units. The goal of this project is to develop a navigation system that use secondary inertial variables, such as velocity, to enable long-term precise navigation in the absence of Global Positioning System (GPS) and beacon signals. In this(More)
The design, implementation, and characterization of a microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone are presented in this paper. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. Human temporal bones acoustic response characterization results are used(More)
An RF low phase noise voltage-controlled oscillator is implemented with micro-machined IC-compatible variable capacitors and three-dimensional coil inductor. Unlike conventional on-chip passive devices, the micromachined variable capacitors achieve a high-Q value above 60 at 1 GHz with a 15% tuning range for a nominal 2 pF capacitance with 3 V tuning(More)