Daisuke Chino

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An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mmtimes1.5 mmtimes1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10(More)
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