Da-Yung Wang

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TiAlN and TiAlSiN coatings were synthesized by a cathodic arc deposition process. Titanium, Ti50Al50 alloy and AlSi (88 at.% of Al and 12 at.% of Si) alloy targets were adopted as the cathode materials. X-ray diffraction analyses revealed that Ti0.5Al0.5N and Ti49Al0.44Si0.07N possess a B1-NaCl crystal structure. The lattice constants of the Ti0.5Al0.5N and(More)
Monolayered TiSiN and multilayered TiSiN/CrN coatings were synthesized by a cathodic arc deposition process. The chromium and Ti/Si (80/20 at.%) alloy targets were adopted as the cathode materials, altering the ratio of cathode current (I[TiSi]/I[Cr]) to obtain various multilayer periodic thicknesses of multilayered TiSiN/CrN coatings. X-ray diffraction and(More)
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