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Electron-sheath interaction in capacitive radio-frequency plasmas
Recent experimental and theoretical work on the interaction of electrons with a moving radio‐frequency (rf) sheath has shown that this interaction is an important electron heating mechanism inExpand
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Global model for an rf hydrogen inductive plasma discharge in the deuterium negative ion source experiment including negative ions
A study of the gas-phase kinetics and the plasma chemistry for an rf inductively coupled H2 plasma discharge, in the deuterium negative ion source experiment (DENISE), has been carried out by meansExpand
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Ellipsometric study of silicon surface damage in electron cyclotron resonance plasma etching using CF4 and SF6
In situ ellipsometry has been used to measure in real time the surface damage introduced during electron cyclotron resonance (ECR) plasma etching of silicon as a function of rf bias to the substrate.Expand
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Global model of a radiofrequency H2 plasma in DENISE
A global model of a radiofrequency (rf) inductively coupled H2 plasma discharge in the Deuterium Negative Ion Source Experiment (DENISE) has been developed using the numerical code `Global ModelExpand
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Fluorocarbon high‐density plasmas. I. Fluorocarbon film deposition and etching using CF4 and CHF3
Fluorocarbon film deposition in discharges used for oxide etching plays a key role in determining the profile shape of contact holes and the etch selectivity with respect to the mask and theExpand
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Collisionless electron heating by capacitive rf sheaths.
High-frequency plasma discharges are often sustained by collisionless heating of electrons; the nature of these mechanisms is a central problem in the theory of such discharges. In capacitiveExpand
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Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis
Electrodeless radiofrequency discharges exhibit two modes of operation: a low-density mode in which the power is capacitively coupled to the plasma and which is known as the E-mode, and a higherExpand
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Collisionless electron heating by radio‐frequency plasma sheaths
Collisionless rf sheaths have been investigated in a self‐consistent particle simulation. The one‐dimensional simulation is bounded by an rf driven electrode on one side and quasineutral plasma onExpand
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An experimental study of breakdown in a pulsed Helicon plasma
Fast time-resolved measurements of ion and electron energy distributions in the first 200 mu s of a discharge in a 20 cm diameter glass Helicon source show that, 10 mu s after the RF is turned on, anExpand
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Transport of argon ions in an inductively coupled high-density plasma reactor
The first direct observation of the velocity distribution of the metastable Ar+*(2G9/2) ions in the presheath of an inductively coupled plasma has been achieved by using the Doppler shifted laserExpand
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