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  • D E Aspnes
  • 2004
I investigate the dependence of shot-noise-limited uncertainties of the ellipsometric parameters psi, and delta for the rotating-analyzer ellipsometer (RAE) and the rotating-compensator ellipsometer (RCE) of the polarizer-sample-compensator-analyzer type. The development is general and takes into account correlations among the Fourier coefficients of the(More)
The theoretical precision attainable from a number of types of ideal null and photometric ellipsometers is investigated quantitatively. Photometric and modulated null ellipsometer systems are shown to be approximately comparable with respect to precision when operating under shot-noise limited conditions. Differences are due principally to intrinsic(More)
The observation of surface-plasmon resonances in indium tin oxide (ITO) thin films is complemented with the effects of hybrid ITO/Au conducting layers where charge densities can be tuned. Where carrier densities are similar (ITO and nanoparticle Au), the plasmonic behavior is that of a monolithic ITO thin film. Where the carrier density of one layer is much(More)
We describe the design, construction, alignment, and calibration of a photometric ellipsometer of the rotating-analyzer type. Data are obtained by digital sampling of the transmitted flux with an analog-to-digital converter, followed by Fourier transforming of the accumulated data with a dedicated minicomputer. With an operating mechanical rotation(More)
The eight distinct reflection configurations for pairs of toroidal mirrors are investigated by numerically calculating their aberration patterns for on- and off-axis source points. The best performance is obtained for a Z-shaped configuration where the two mirrors deflect in opposite directions across a common interior sagittal and tangential focus. Imaging(More)
Absolute constraints, namely, the Schwarz inequality and a complementary expression derived by us, are used to obtain corresponding absolute constraints on the Fourier coefficients of the intensity transmitted through rotating-compensator polarimeters and ellipsometers. These expressions allow the investigation of artifacts that result in mixed or(More)