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| This paper presents some results of our development and test eeorts in micromachine design for optical modulation. In this work, we have developed, using a readily available surface micromachine fabrication process (MUMPs), a series of arrayed micromirror elements. These element arrays form phase-mostly spatial light modulators (SLM's), similar to Texas… (More)
| This paper describes several innovative optical modulator devices for reconngurable free-space interconnect, in an eeort to demonstrate both the technology limitations and the performance advantages available via this application of microelec-tromechanical systems.
We describe a programmable capacitor technology under development at NCSU and its potential application in building programmable interconnect devices useful for system level connectivity functions, phased array beam steering, and RF switching. Crossbars are made from arrays of electrostatically controlled bistable MEMS-based capacitors. These new devices… (More)
This paper presents top-down holistic design and verification of a MEMS-based 3-D optical switching subsystem utilizing an integrated CAD environment. The subsystem design takes place in a nodal simulation environment that includes models for fibers, lenses, mirrors, control elements, general electronics, and detailed mechanics. In this paper, we explore… (More)