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Doped ZnO films are an important class of transparent conductive oxides, with many applications demanding increased growth control and low deposition temperatures. Therefore, the preparation of… (More)
We have investigated the suitability of atomic layer deposition (ALD) for SiO2 optical coatings and applied it to broadband antireflective multilayers in combination with HfO2 as the high refractive… (More)
Minimizing the recombination losses of charge carriers at Si and other semiconductor surfaces is an important topic for many electronic and photonic devices. It is a particularly important issue in… (More)