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—We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and(More)
Providers in pediatric emergency departments (ED) frequently encounter a variety of life-threatening respiratory illnesses. This article reviews current updates on the management and unique adjuncts for 3 common respiratory illnesses. Discussed first is bronchiolitis and the impact of high flow nasal cannula on reducing the need for intubation. Next, the(More)
Nearly all underwater vehicles and surface ships today use sonar and vision for imaging and navigation. However, sonar and vision systems face various limitations, e.g., sonar blind zones, dark or murky environments, etc. Evolved over millions of years, fish use the lateral line, a distributed linear array of flow sensing organs, for underwater hydrodynamic(More)
PDMS (polydimethylsiloxane) elastomer is widely used in MEMS. However, PDMS is non-conductive and as a result is used in mostly structural applications. We report methods for monolithic integration of conductive and non-conductive PDMS for realizing wholly polymer-based devices with embedded elastomer wires, electrodes, heaters, and sensors. In this work we(More)
Hydrodynamic imaging using the lateral line plays a critical role in fish behavior. To engineer such a biologically inspired sensing system, we developed an artificial lateral line using MEMS (microelectromechanical system) technology and explored its localization capability. Arrays of biomimetic neuromasts constituted an artificial lateral line wrapped(More)
— This work presents results towards realizing a flexible multimodal tactile sensing system for object identification. Using polymer substrates and simple fabrication, robust devices are made that can identify objects based on texture, temperature, as well as material properties such as hardness and thermal conductivity. These capabilities are possible(More)
Biological organisms interact with their surroundings by means of a variety of sensory systems of which a number of ones is based upon micromechanical principles such as bending hairs for tactile sensing in human beings, [1] shaft-like deflection of stiff hairs for vibration detection in spiders, [2] flexible membranes for night vision in snakes, [3] long(More)
We report the development and application of an artificial hair cell (AHC) flow sensor inspired by biological systems. With optimized design and fabrication process, the AHC is characterized in terms of sensitivity, calibration, and robustness. Especially, an AHC can discern variations of water flow down to 0.1mm/s and survive 55˚deflections. The sensor has(More)
We report the development of a high sensitivity artificial haircell (AHC) sensor that employs high aspect-ratio cilium (up to 700μm tall) made of SU-8 epoxy and silicon piezoresistive strain sensors. In this work, we demonstrate the application of the artificial haircell for underwater flow sensing. For device characterization, we have performed deflection(More)
—Artificial Haircell (AHC) sensor is presented for highly sensitive flow-field measurements. Design considerations and MEMS process flows are given. Oscillating flow field measurements show sensitivity down to 0.6mm/s flow rates, steady state flow fields detected down to 0.1mm/s.