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Abstract Thin film barium strontium titanate (BST) shows great promise for voltage tunable dielectric devices for use at RF and microwave frequencies. An MOCVD process has been developed for… Continue Reading
Recently, there has been significant interest in use of (Ba, Sr)TiO/sub 3/ (BST) thin films for tunable high frequency (RF and microwave) components. In this paper we discuss the electrical… Continue Reading
Abstract Recently, there has been significant interest in use of (Ba,Sr)TiO3 (BST) thin films for tunable high frequency (RF and microwave) components. In a previous work we have shown that BST thin… Continue Reading
Composite metallization stacks consisting of 1.5 μm W layers and 0.1 μm Ir layers have been developed for low series resistance electrode applications. These hybrid metallization layers are… Continue Reading
MOCVD processes for (Ba,Sr)TiO3 (BST) and Pb(Zr,Ti)O3 (PZT) are described based on different metal – organic precursors. In the case of BST, processes using polyamine and tetraglyme adducts of group… Continue Reading