Learn More
An overview on the use of microelectromechanical systems (MEMS) technologies for timing and frequency control is presented. In particular, micromechanical RF filters and reference oscillators based on recently demonstrated vibrating on-chip micromechanical resonators with Q's > 10,000 at 1.5 GHz are described as an attractive solution to the increasing(More)
A new fabrication methodology that allows self-alignment of a micromechanical structure to its anchor(s) has been used to achieve vibrating radial-contour mode polysilicon micromechanical disk resonators with resonance frequencies up to 1.156 GHz and measured Q's at this frequency >2,650 in both vacuum and air. In addition, a 734.6-MHz version has been(More)
— A completely monolithic high-Q Q Q oscillator, fabricated via a combined CMOS plus surface micromachining technology , is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator with the intent of achieving high stability. The operation and performance of micromechanical resonators are modeled, with emphasis(More)
—An overview of recent progress in the research and development of micromachined devices for use in wireless communication subsystems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and mm-wave filters, low loss micromechanical switches, micro-scale(More)
2 2 2 4 p o x V A Q d KM R ε = 2 2 2 2 − = n q ζ , E R f o) 2 2 (2 σ ρ π ζ + = , σ ξ − = 1 2 , () [ ] () 2 n nq q n q n n n The quartz crystal used in the reference oscillator in a wireless communication transceiver is among the most difficult to integrate on chip. On-chip devices capable of matching its Q (on the order of 10,000) and temperature stability(More)
A fully monolithic oscillator achieved via MEMS-last integration of low temperature nickel micromechanical reso-nator arrays over finished foundry CMOS circuitry has been demonstrated with a measured phase noise of-95 dBc/Hz at a 10-kHz offset from its 10.92-MHz carrier (i.e., output) frequency. The use of a side-supported flexural-mode disk resonator-array(More)
Micromechanical (or "μmechanical") communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible MEMS-based receiver front-end architectures are then presented that use these(More)