Chunlei Wang

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We have demonstrated that carbon-microelectromechanical systems ͑C-MEMS͒, in which patterned photoresist is pyrolyzed in inert environment at high temperature, constitutes a powerful approach to building 3D carbon microelectrode arrays for 3D microbattery applications. High aspect ratio carbon posts ͑Ͼ10:1͒ are achieved by pyrolyzing SU-8 negative(More)
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