Chung-Yang Sue

Learn More
Owing to the imposed coupling accelerations such as quadrature error and cross-axis perturbation, the micro-machined gyroscope could not be unconditionally retained at resonant mode. Once the preset resonance is not sustained, the performance of the micro-gyroscope is accordingly degraded. In this paper, a direct model reference adaptive control loop which(More)
An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, implemented by the 0.25 µm 1P5M standard CMOS process, is designed(More)
  • 1