Chung-Yang Sue

Learn More
Being beneficial from dramatic progress in bio-chemical and micro-electro-mechanical technologies, DNA manipulation devices can be miniaturized to expedite amplification processing for virus detection. Polymerase chain reaction (PCR) and reverse transcription polymerase chain reaction (RT-PCR) are two typical examples of them. In this report, a micro-RT-PCR(More)
Owing to the imposed coupling accelerations such as quadrature error and cross-axis perturbation, the micro-machined gyroscope could not be unconditionally retained at resonant mode. Once the preset resonance is not sustained, the performance of the micro-gyroscope is accordingly degraded. In this paper, a direct model reference adaptive control loop which(More)
An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, implemented by the 0.25 µm 1P5M standard CMOS process, is designed(More)
A contactless thin-layered torque sensor with fully-digital signal processing circuit is proposed in this work. The mechanical structure of the torque sensor is an orange-slice-alike flexible body. Two links, beforehand aligned, with B/W stripes play the role of optical grating by resolution 1? as no any torque applied to the shaft. As long as the(More)
  • 1