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A new type of piezoelectric linear motor incorporating a traveling wave has been developed. The linear motor is comprised of a stator and a carriage. The stator design, which consists of a meander-line structure and gear teeth mounted on the meander-line structure, is the focus of this article. The meander-line structure is constructed with bimorph(More)
This article presents the dynamic modeling of a bimodal piezoelectric ceramic motor by use of the finite element method. The extended Hamilton's principle is utilized for formulating dynamic equation of motion, and the Lagrange multiplier method is used to model the contact dynamics between the resonator beam tip and the rotor. The numerical simulation(More)
This article continues the discussion of a traveling-wave piezoelectric linear motor. Part I of this article dealt with the design and analysis of the stator of a traveling-wave piezoelectric linear motor. In this part, the discussion focuses on the structure and modeling of the contact layer and the carriage. In addition, the performance analysis and(More)
In this article, hysteresis controller design and static error compensation method for a 6-dof micro-positioning platform driven by piezoelectric actuator is studied. The nonlinear hysteresis effect of the piezoelectric actuator is analyzed by means of Preisach model. Its inverse model is used as the feedforward controller. Error compensation method is(More)
A 6DOF Stewart platform driven by piezoelectric actuators was designed for nanoscale positioning. A measurement method to directly measure the pose (position and orientation) of the end-effector is investigated in this article. By means of the measured parameters task-space on-line control objective can thus achieve. The design of the sensor holder for(More)
In this article, speed control for a platform driven by a wedge-type piezoelectric motor is investigated. Such a motion control system is subject to disturbance like friction, preload and operating temperature change, so that a predictive linear relation between the applied input voltage and the output platform velocity is difficult to keep. Especially,(More)
In this article, a Cartesian coordinate nano-scale positioning platform driven by stack-type piezoelectric actuator associated with flexure hinge mechanism is developed. Structural design and analysis, system identification, and feedforward controller design to deal with the hysteresis effect, as well as and the feedback PID controller designed by use of(More)
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