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  • Sebastian Rank, Christian Hammel, Thorsten Schmidt, Germar Schneider
  • Computer Science
  • Winter Simulation Conference (WSC)
  • 2015 (First Publication: 6 December 2015)
  • Usually simulation studies of automated material handling systems of semiconductor fabs are extremely time consuming. This is due to the high detail of models used for investigations which are partlyExpand
  • Robert Schmaler, Christian Hammel, Thorsten L Schmidt, Matthias Schöps, Joerg Luebke, Ralf Hupfer
  • Engineering
  • IEEE Transactions on Semiconductor Manufacturing
  • 2017 (First Publication: 26 September 2017)
  • Due to reasons like higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs, existing automated material handling systems are facing ever risingExpand
  • Robert Schmaler, Christian Hammel, Thorsten L Schmidt, Matthias Schöps
  • Engineering
  • 27th Annual SEMI Advanced Semiconductor…
  • 2016 (First Publication: 16 June 2016)
  • Integration of transport system information into Manufacturing Execution System (MES) dispatching rules is not yet standard practice. Yet, it could be helpful in several areas of a semiconductorExpand