Christian Fischmann

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The handling of thin wafers in today’s production lines demands high standards of the automation as well as complex investigations with a closer look on the actual and future needs for an economic and competitive production of solar cells. This paper describes the analysis and evaluation methods developed by the authors for ultrathin wafers (<100 μm) which(More)
The automated material handling system (AMHS) is a highly automated transport solution of actual 300mm semiconductor waferfabs. The big logistic challenge in such a running system is the just-in-time delivery of lots (carriers). Therefore, beside tracks and vehicles, there are different storages (stocker) and buffers (under track storages and load ports)(More)
The use of automated guided vehicles in high-tech industries such as the semiconductor industry results, due to the size of such factories, in highly complex rail-networks. In contrast to the routing of vehicles that are transporting a lot to its destination, the scheduling of empty vehicles is an inadequate examined problem. This poster is dealing with the(More)
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