Chinmoy Saayujya

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Conventionally manufactured accelerometers based on piezoelectric lead zirconate titanate (PZT) have been used for decades, but integration issues hinder their application in micro-electro-mechanical systems (MEMS). Compared to PZT, zinc oxide (ZnO) has lower piezoelectricity and is not an attractive material for use in traditional bulky accelerometers due(More)
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