Chin-Yu Chou

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A 3-D mechanically-coupled resonator array has been demonstrated for the first time using CMOS-MEMS technology. A high-performance vertically-coupled (VC) CMOS-MEMS resonator pair was utilized to extend the array topology into 3-D configuration with an on-chip interfaced circuit through a TSMC 0.35 μm 2P4M CMOS-MEMS platform. An array design of 9 VC(More)
In this work, a 1.2-MHz CMOS-MEMS DETF (double-ended tuning fork) resonator with its on-chip tunable transimpedance amplifier (TIA) is designed to measure the ring-down response of the resonator circuit for pressure sensing applications. From the time-domain ring-down waveform, the frequency and quality factor of the resonator circuit can be extracted(More)
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